| 주 저자 | Taek-Don Kwon, Soo-Jin Lee, Jae-Hee Lee, Jae-Weon Jeong |
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| 공동 저자 | - |
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| 소속 | Department of Architectural Engineering, College of Engineering, Hanyang University, Seoul, 04763, Republic of Korea |
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| Abstract | The semiconductor industry consumes a lot of energy in the air conditioner, because it needs to create a cleanroom environment. In particular, semiconductor fabrication plants located in hot and humid climates require many chillers to run, resulting in more severe power consumption. In semiconductor fabrication plant air conditioning system, about 35% of total supply air removes the heat generated by the equipment and is discharged as unpolluted low-wet bulb temperature and we call it general exhaust gas. The purpose of this study is to design the energy recovery system that cold energy can be recovered by applying water-side free cooling technology to general exhaust gas, and to analyze the energy saving potential that can be obtained when reused recovered cold energy in an air conditioning system. Water-side free cooling method is producing cooling water by supplying general exhaust air to the cooling tower and using it to pre cool the outdoor air entering the Make-Up Air Unit. Theoretical calculation results showed that the energy recovery system using the water-side free cooling technology can reduce 7.8-11.9% of the total cooling energy supplied to the Make-Up Air Unit in summer according to water-to-air ratio of cooling tower of energy recovery system. However, the actual energy saving effect considering the power consumption of the energy recovery system can be greatly reduced depending on the water-to-air ratio of the cooling tower and the cooling water pump head of energy recovery system. |
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| Keyword | - |
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| 페이지 | pp. 0~0 |
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| 논문 파일 |
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| 게재일시 |
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| DOI | - |
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| 학회/저널명 | IAQVEC 2023 |
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| 년도 | 2023 |
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| 추가 문구 | - |
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| 등록 일시 | 2025-06-18 18:53:10 |
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